JPH0523568Y2 - - Google Patents
Info
- Publication number
- JPH0523568Y2 JPH0523568Y2 JP17182486U JP17182486U JPH0523568Y2 JP H0523568 Y2 JPH0523568 Y2 JP H0523568Y2 JP 17182486 U JP17182486 U JP 17182486U JP 17182486 U JP17182486 U JP 17182486U JP H0523568 Y2 JPH0523568 Y2 JP H0523568Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- ring
- tension
- outer ring
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 18
- 239000010408 film Substances 0.000 description 77
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17182486U JPH0523568Y2 (en]) | 1986-11-08 | 1986-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17182486U JPH0523568Y2 (en]) | 1986-11-08 | 1986-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6378065U JPS6378065U (en]) | 1988-05-24 |
| JPH0523568Y2 true JPH0523568Y2 (en]) | 1993-06-16 |
Family
ID=31107810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17182486U Expired - Lifetime JPH0523568Y2 (en]) | 1986-11-08 | 1986-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0523568Y2 (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4583568B2 (ja) * | 2000-09-19 | 2010-11-17 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| US20050016464A1 (en) * | 2003-07-24 | 2005-01-27 | General Electric Company | Methods and fixtures for facilitating handling of thin films |
| JP2019044249A (ja) * | 2017-09-06 | 2019-03-22 | キヤノン株式会社 | アライメント装置、および、成膜装置 |
-
1986
- 1986-11-08 JP JP17182486U patent/JPH0523568Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6378065U (en]) | 1988-05-24 |
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